2004 Canon Canon FPA- 5500iZ+

TEL ACT12 - Double Block - 300mm + LITVC1-02

Model LITVC1-02

Description Canon FPA- 5500iZ+

Wafer Size Range   Minimum 300 mm  Maximum 300 mm  Set Size 300 mm

Other Information Block 2:

- 4x Coater Unit (IC Cup)           - 4 Resist Lines / coater Unit           - 11 Resist pumps "RGEN01" with Entegris Filter Manifold           - 1x RRC / EBR nozzle / coater unit           - Back Rinse Nozzle standard- 2x adhesion (ADH) unit- 5x chill plate (CPL)- 6x standard hot plate (LHP)- 3x high temperature hot plate (HHP)- 2x Cup wash holder unit incl. Cup wash disc- 1x Transfer unit (TRS)- 1x Transfer chill plate (TCP)Block 3:- 4x Developer unit       - 2 Developer Lines (SH - Nozzle) / unit       - 1x Rinse Nozzle / unit       - Back Rinse Nozzle standard3x chill plate (CPL)4x chilling hot plate (CHP)5x standard hot plate (LHP)Interface Block- connection Canon iZ Stepper- 1x WEE unit- 2x Buffer station- 1x chill plate (CPL)

Condition Good

Year of Manufacture 2004

Power Requirements 200-208 V   50/60 Hz   3 Phase

CE Marked YES