2004 Canon FPA- 5500iZ+

TEL ACT12 - Double Block - 300mm + LITVC1-02

Model LITVC1-02

Description Canon FPA- 5500iZ+

Wafer Size Range   Minimum 300 mm  Maximum 300 mm  Set Size 300 mm

Other Information 

Block 2:

- 4x Coater Unit (IC Cup)           

- 4 Resist Lines / coater Unit           

- 11 Resist pumps "RGEN01" with Entegris Filter Manifold           

- 1x RRC / EBR nozzle / coater unit           

- Back Rinse Nozzle standard

- 2x adhesion (ADH) unit

- 5x chill plate (CPL)

- 6x standard hot plate (LHP)

- 3x high temperature hot plate (HHP)

- 2x Cup wash holder unit incl. Cup wash disc

- 1x Transfer unit (TRS)

- 1x Transfer chill plate (TCP)

Block 3:

- 4x Developer unit       

- 2 Developer Lines (SH - Nozzle) / unit       

- 1x Rinse Nozzle / unit       

- Back Rinse Nozzle standard

3x chill plate (CPL)

4x chilling hot plate (CHP)

5x standard hot plate (LHP)

Interface Block

- connection Canon iZ Stepper

- 1x WEE unit

- 2x Buffer station

- 1x chill plate (CPL)

Condition Good

Year of Manufacture 2004

Power Requirements 200-208 V   50/60 Hz   3 Phase

CE Marked YES