1996 Applied Materials AMAT P-5000 Mark II WxZ

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Currently Configured for: 200mm

Software: b6.02

MF: P5000 Mark II

Qty 2 - WxZ: WSiX Deposition

Chuck: Anodized Aluminum

MFCs: 12 Horiba Digital MFCs

Robot: ROBOT ASSY 8 IN AMAT 5000

Dry Pumps:

1 Edwards IXH620, 1IQD80/QMB250 stack, 1 IQDP80

Chillers:

AMAT Heatex 1, Neslab HX150

Delatech CDO abatement qty2

Power glitch protection