2009 FEI Nova NanoSEM 435 FEG-SEM

Currently warehoused.

Deinstalled by FEI

Complete system.

- Dual EDS

- Spatial resolution: 3-4 nm under optimal conditions

- Accelerating Voltages from 0.5 kV - 30 kV

- Everhart Thornley Detector (for SE)

- Solid-state BSED for high vacuum

- In Lens SE (TLD SE) and BSE (TLD BSE) detectors

- Gatan Chroma CL Detector for wavelength 400-800 nm

- EDS X-ray mapping (dual Bruker 30 mm2 detectors)

- Low Vacuum Capability (< 0.1 Torr) using UHR low vacuum SED (Helix Detector) and low vacuum SED (LVD)

- Deceleration Mode, which allows to work at accelerating voltage of 2kV

- IR-CCD camera for in-chamber viewing

- 5-Axes motorized Stage (X-Y-Z-Tilt-Rotation)

- Working distance 5 mm -13 mm

- Beam current of up to 10 nA in High-Resolution Mode and up to 22 nA in Analytical Mode

2009 Vintage