1996 Hitachi S-8820

Still installed in the cleanroom under vacuum.

Working Condition but sold As Is.

It’s comes with HDD and Software included.

2 Units of Scroll Pumps will be removed as they need them for their using, otherwise it’s complete.

Wafer : 6 Inches.

Vintage : 1996.

CCD Camera

SECS / GEM

Open cassette

(2) Load ports

MECS UTC820Z Robot

Measuring size: 0.1-10 μm

Objective lens:

FCM Objective lens system

Electromagnetic condenser

Thin aperture with heater

Power supply: 700-1300 V