1996 Hitachi S-8820

1996 Hitachi S-8820
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Description
Still installed in the cleanroom under vacuum.
Working Condition but sold As Is.
It’s comes with HDD and Software included.
2 Units of Scroll Pumps will be removed as they need them for their using, otherwise it’s complete.
Wafer : 6 Inches.
Vintage : 1996.
CCD Camera
SECS / GEM
Open cassette
(2) Load ports
MECS UTC820Z Robot
Measuring size: 0.1-10 μm
Objective lens:
FCM Objective lens system
Electromagnetic condenser
Thin aperture with heater
Power supply: 700-1300 V
Specifications
| Manufacturer | Hitachi |
| Model | S-8820 |
| Year | 1996 |
| Condition | Used |
| Stock Number | BM5735 |































