2001 Canon 5500iz

'- 12" Standard Wafer Chuck and 12" wafer handling system

- SMIF type reticle loading ports and reticle changer unit

- Pellicle Particle checker installed

- Hg-lamp will be rmoved prior shipping

- Coolant will be removed prior shipping

- all batteries will be removed prior shipping

Wafer Size Range   Minimum 300 mm

Other Information Missing parts:

No harddisk at stepper workstation installed.

No printed manual. Manual available as PDF/HTML.

No transportation lock parts.

No UPS unit installed.

Condition Good

Year of Manufacture 2001

CE Marked YES

Exterior Dimensions   Width 90.551  in  (230.0 cm)  Depth 133.858  in  (340.0 cm) 

 Height 102.362  in  (260.0 cm)

Weight 25,132  lb  (11,400 kg)