1997 Canon FPA 3000 i5+

Canon FPA 3000 i5+

General Configuration:

• FPA 3000 - i5(+)
• Manufactured in June / 1997
• 8“ Wafer Chuck, Notch PA unit
• 6“ Nikon-type Reticle Changer
• Reticle Barcode-Reader =  yes
• Cassette Barcode Reader = yes
• Pellicle Particle Checker =  yes
• Online - ESPA =  yes
• Interface type:  right
• Standard flys eye lens
• Chamber type: CD80

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Cassette to Cassette YES

Other Information Currently exchanged items ( 2023-2025) :

• Illumination Shutter
• Stage Laser
• Cooling Coil Chamber
• Wafer Feeder Roboter
• UPS for Workstation

Uniformity / Illumination Data at Lamp hrs 712 h :

uc0:6308  

li0:7299  

iucVal:2.804 

maxVal:105.760

minVal:99.992

areaX:22.0000

areaY:26.0000

pitchX:2.2000

pitchY:2.6000

count:100

Special Illumination Mode 1

        Lens NA  0.54   Multiple Stopper      sigma  0.77

        1st zoom 22.30 [%] input lens none 

         2nd Zoom         Compensator 2 Value    Direction

          0.0 [%]                     44.0 [%] -97.5 [degree]

Condition GoodYear of Manufacture 1997Power Requirements    50/60 Hz   3 PhaseWeight 3,406  lb  (1,545 kg)