LAM Rainbow 4528I

LAM Rainbow 4528I - Plasma Etch

Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to ship

Wafer size: 200mm

Former process: oxidepets

Former MES/ERP name: LAM14

Dimensions & weight estimates:

Mainframe dim (cm): 111.8 x 137.2 x 167.5

Mainframe weight (kg): 788

Bypack1 dim (cm): 55.9 x 81.3 x 110.5

Bypack1 weight (kg): 135

Bypack2 dim (cm): 55.9 x 22.9 x 76.2

Bypack2 weight (kg): 120

System Model: LAM RAINBOW

LAM Rainbow 45xx series

Specific model: 4528i

Process: Oxide Etch

Wafer size: 200 mm

Wafer type: Notch

Valve type: AC2 Throttle valve (main chamber) AC2 Throttle valve (ISO chamber)

ESC: Yes

Bulkhead: ??

Monochromator Endpoint: Yes

Software: Envision 1.5.2

RF: Paramount 1213 Paramount MF 3KW

Cart: RF cart

Iso module: Yes

AC box: -002 (breakers)

Gas and process configuration for 

• Gas1-6 Main chamber • Gas7-8 ISO chamber 

Robot type: Harmonic Drive

Loader type: Hine indexers 38A

Loadlock: Entrance (ISO chmbr) and Exit LL

Turbo pumps: No

Controllers: AC2T controller ISO THV AC2 controller main chamber THV

Gas box:

AC Rack: Yes (Local power box) on mezzanine

SW Version:

Vintage: rb24041

Missing/defective parts: None