1995 LAM Rainbow 4526I

LAM Rainbow 4526I - Plasma Etch

Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to load for packaging

Vintage: 1995+/-3y

Wafer size: 150mm

200mm convertible: Yes

Former process: oxidepets

Former MES/ERP name: LAM3

Dimensions & weight estimates:

Mainframe dim (cm): 111.8 x 137.2 x 167.5

Mainframe weight (kg): 788

Bypack1 dim (cm): 55.9 x 81.3 x 110.5

Bypack1 weight (kg): 135

Bypack2 dim (cm): 55.9 x 22.9 x 76.2

Bypack2 weight (kg): 54

TECHNICAL SPEC FOR Etch tool

System Model: LAM RAINBOW

LAM Rainbow 45xx series

Specific model: 4526i

Process: Oxide Etch

Wafer size: 150 mm

Wafer type: Jeida flat

Valve type: AC2 Throttle valve (main chamber) AC2 Throttle valve (ISO chamber)

ESC: No

Bulkhead: ??

Monochromator Endpoint: Yes

Software: Classic 7.31-42

RF: PDW2200 400Kc generator (main chamber) RFG1250 13.56MHz (ISO chamber)

Cart: RF cart

Iso module: Yes

AC box: -002 (breakers)

Gas and process configuration for • Gas1-6 Main chamber • Gas7-8 ISO chamber

GAS 1 Ar 1000 sccm

GAS 2 CF4 100 sccm

GAS 3 CHF3 50 sccm

GAS 4 He 1000 sccm

GAS 5 O2 20 sccm

GAS 6 N2 200 sccm

GAS 7 NF3 500 sccm

GAS 8 He 500 sccm

Robot type: Harmonic Drive

Loader type: Hine indexers 38A

Loadlock: Entrance (ISO chmbr) and Exit LL

Turbo pumps: No

Controllers: AC2 controller ISO THV AC2 controller main chamber THV

Gas box:

AC Rack: Yes (Local power box) in basement

SW Version:

Vintage: rb2873

Missing/defective parts: None