2000 LAM Rainbow 4526XL

LAM Rainbow 4526XL - Plasma Etch

Current tool status: Deinstalled, foil wrapped and stored in warehouse, ready to load for packaging

Vintage: 2000+/-3y

Wafersize: 150mm

200mm convertible: Yes

Former process: oxidepets

Former MES/ERP name: LAM5

Dimensions & weight estimates:

Mainframe dim (cm): 111.8 x 137.2 x 167.5

Mainframe weight (kg): 788

Bypack1 dim (cm): 55.9 x 81.3 x 110.5

Bypack1 weight (kg): 135

Bypack2 dim (cm): 80 x 40 x 130

Bypack2 weight (kg): 250

Bypack3 dim (cm): 47.5 x 93 x 126

Bypack3 weight (kg): 226.8

System Model: LAM RAINBOW XL

LAM Rainbow 45xx series

Specific model: 4526 XL

Process: Oxide Etch

Wafer size: 150 mm

Wafer type: Jeida flat

Valve type: VAT65

ESC: Yes

Bulkhead:

Monochromator Endpoint: Yes

Software: Envision 1.6.1-005

RF: ENI-GHW50 ENI-2MHz

Cart: RF cart

Iso module: No

AC box: -002 (breakers)

Gas and process configuration for - Chamber (1)

Ar 485,0 sccm

CF4 20.0 sccm

CHF3 20.0 sccm

C4F8 19,5 sccm

CO 200.0 sccm

O2 LOW 20.0 sccm

O2 HIGH 1000.0 sccm

N2 100.0 sccm

Robot type: Harmonic Drive

Loader type: Hine indexers 38A

Loadlock: Entrance and Exit LL

Turbo pumps: HGP pump

Controllers: HGP pump controller VAT 65 controller

Gas box:

AC Rack: Yes (Local power box) in basement

SW Version:

Vintage: rb24213

Missing/defective parts: None