2004 LAM Allian
2004 LAM Allian
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Description
Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 200 mm
Number of Chambers 0
Process Capabilities 4 Chamber System
Controller Type PC Controller Type
Software Revision Level Next
Power Requirements 3 Phase
Year of Manufacture 2004
Condition Good
Specifications
| Manufacturer | LAM |
| Model | Allian |
| Year | 2004 |
| Condition | Used |
| Stock Number | BM5772 |