1995 TEL MK7-S

TEL MK7-S Coater_Developer

missing parts: 2 resist pumps, 1Developer Line

Add. Info:

TYP A1

M/C Typ FC-9801F#1

SD/HD Typ Commandpost

System Vers. MK8G2.38

Alarm File ALM00166.OEN

Sp. Al.File AL00TT.OEN

GEM 1.72

Lines 1(3)

Pumps 1xmini

EBR programable

T/H-Controller Semifab CD200

Backrinse yes

Lines 1 x H-Nozzle

Rinse yes

Backrinse yes

 Last Time in production 1/1/24

Wafer Size Range   Minimum 200 mm  Maximum 200 mm

Condition Good

Year of Manufacture 1995

CE Marked YES

Exterior Dimensions   Width 135.827  in  (345.0 cm)  Depth 55.118  in  (140.0 cm)  

Height 80.709  in  (205.0 cm)