TEL MK7-S Coater_Developer

missing parts: 2 resist pumps, 1Developer Line

Add. Info:

TYP A

M/C Typ FC-9801F#2

SD/HD Typ Commandpost

System Vers. MK8G2.38

Alarm File ALM00166.OEN

Sp. Al.File AL00TT.OEN

GEM 1.72

Lines 1(3)

Pumps 1xmini

EBR programable

T/H-Controller Shinwa CP-I

Backrinse yes

Lines 1 x H-Nozzle

Rinse yes

Backrinse yes

Wafer Size Range Minimum 200 mm Maximum 200 mm

Condition Good

Year of Manufacture 1996

CE Marked YES

Exterior Dimensions Width 135.827 in (345.0 cm) Depth 55.118 in (140.0 cm)

Height 80.709 in (205.0 cm)

1996 TEL MK7-S