1999 Trikon Tech Ltd. Sigma FxP200 RevA

It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete),

1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. The

Platform is upgradet from T5 Controller (MX800) to GTM with PC104 Controller. All DEP Chambers HSE and Transport has CTI Onboard 8F Cryos and 2 9600 Cryo Compressor. No Forline Pumps

Wafer Size Range   Minimum 200 mm  Maximum 200 mm  Set Size 200 mm

Accessories Brooks MX800 Platform with 2 VCE6 Loadlocks, 4 Std. RevA DEP, 1 RevA HSE, 1 MKII Heat.

2CTI 9600 HV Cryo Compressor

Other Information Brooks MKII Platform upgradet to SPTS GTM PC104

Condition Good

Year of Manufacture 1999

Power Requirements 380 V   50 Hz   3 Phase