2014 KLA Aleris 8350 Advanced Film Metrology Tool

KLA-TENCOR Aleris 8350 Advanced Film Metrology Tool

• Dual 300 mm Loadports
• Analysis of 190nm-800nm Wavelengths
• White Light Reflectometer
• Broadband Spectroscopic Ellipsometer
• Single Wave Ellipsometer
• Stress Measurement
• iDesorber 

Description Advanced Film Metrology Tool

Wafer Size Range   Minimum 300 mm  Maximum 300 mm  Set Size 300 mm

Illumination Source Type Multi-wavelength Source

Multi-Layer Film Capacity YES

Micro Spot Optics YES

Scanning Stage YES

Wafer Mapping YES

Condition Excellent

Year of Manufacture 2016

Power Requirements 208/230 V   16.0 A   50/60 Hz   1 Phase

CE Marked YES