2001 Axcelis Technologies Inc. / Eaton GSD/200E2

High Current Implanter

Ion Implanters

Date of Manufacture: 2001-07-04

Currently Configured for: 150mm

In Fab - Disconnected, Decontaminated, Deinstalled

Date of Audit5-Aug-25

Wafer Size (inches)6

Loading ConfigurationOpen Cassette 

Original Ship Date from OEMJul-01

Software Version6.12.3

Sun SPARCStation VersionNA

Automated Beam tuning and Set-Up w/Eaton AutotuneYes  

Is System On-Line?No

Off-Line Date (if applicable)Never in production

CE Mark Certified? No

OEM Audit Available?Yes 

Can Produce Wafers AS IS? No

Any Known Field Modifications? No

All Cables Present?YES

GEM/SECS Interface Yes  

SECS II Interface No

System ConfigurationModel Type 

High CurrentGSD-200EE

Beamline VersionSTANDARD

Block Upgrade 

Energy Range90KeV

Key Common Options Included?

Clean Room ManualsNo

Standard ManualsYes 

Fab Starter KitNo

Fast Maintenance KitNo

Wafer Handling  

Wafer top-side Bar code reading system capability No

4-Cassette Capability Yes  

Automatic Flat or Notch Alignment Capability w/buffer cassetteYES

Slot-to-Slot Wafer Integrity (200mm only) No

Direct Rotory DriveYES

Two Axis Variable Implant Angle (+/- 11 Degrees in two axis) (Quad Implant Capability)No

NV-GSD 200 Series Process Disk w/Active Cooling & ChillerYes 

Real-Time Dose ControlNo

Real-Time Beam ProfilerNo

Electron Shower w/Gas Bleed and Closed Loop ControlNO

Machine Configuration UPSNo

Enhanced Low Energy BeamlineYES

Single Stage Extraction90keV 

Triple Indexed Mass Analysis Magnet & Power Supply No

Ion Source TypeELS  

Source Material TypeMoly  

VaporizerNONE

Variable Aperture Extraction ElectrodeNo

Flag Faraday InjectorYes  

Three Position Resolving Aperture (90keV only)No

In-Situ Wafer Charge MonitorNo

In-Situ Particle Detector HYTNo

Signal TowerYes 

Lead Floor No

Beamline and Source Pumps     

Source Turbo Pump (P1)STP H2000C    

Beam Line Cryo Pump (P3) CTI ONBOARD 10    

End Station Cryo Pump (P2)CTI ONBOARD 8

Gas Type MFC Type and Model 

ArUNIT 1662 10SCCMSDS

BF3UNIT 1662 10SCCMSDS

AsH3UNIT 1662 10SCCMSDS

PH3UNIT 1660 10SCCMSDS

External Facilities ConnectionsAr | N2 | None 

Support EquipmentKey Common Options  

Cyro CompressorsYes     

Manufacturer/ModelCTI 9600    

Quantity1

Vacuum Pumps No

Remote Disk ChillerYes     

Mfg and ModelSMC-HRS050-WF-20