2015 Evatec Radiance RAD BPM 3 Optic Sputtering System

Currently installed and under power.

With:

Sputtering sources (rotating target, stationary magnet system):

- SSC 300/320 RT DC in chamber S2, 1pc

- SSC 300/320 RT RF in chambers S3 and S6, 2pcs

Plasma sources:

- PSC 301 in chamber S4, 1 pc

Power supplies:

- DC AE pinnacle plus 10kW M/N 3152536-360 E, connected to S3

- DC AE pinnacle plus 10kW M/N 3152536-360 E connected to S6

- AE Cesar 1350 RF power generator 5kW M/N 61300109 L connected to S4

- AE navio match network M/N 3155403-001 B mounted on S4

- AE Cesar 1320 RF power generator 2kW M/N 61300073 J previously used on S4, now

disconnected and not used, condition unknown

- AE navio match network M/N 3155405-001 C not connected, condition unknown

- AE navio match network M/N 3155405-001 C mounted on S3, was never used, condition

unknown

- TDK-Lambda GENH30-25 LOC-519A163-0001, x2 pcs

- 14 rotating chucks + 1 stationary chuck for monitoring. Coats 14 6" substrates in one batch - If monitoring is not used, 15 substrates can be coated, but the 15th substrate is on a stationary

chuck and may have different uniformity.

- MLL single substrate loading

- Clivet WSA-XIN 131 Chiller

- CTI Cryogenics 9600 Compressor

- UPS GTEC ST030T-08

- Edwards XDS35i Forevacuum Pump

- Edwards iLX120 Forevacuum Pump

Sputtering targets:

- Silicon (Si), half used, 3pcs

- Tantalum (Ta), half used, 1 pc

- Niobium (Nb), half used, 1pc

Spare parts:

- MFC N2 100 sccm, Model: MF1C01312CBFV0, 2pcs

- MFC Ar 200 sccm, Model: MF1C00422CBFV0, 1pc

- Shieldings 2nd full set, used, 1pc

- Anode set, used, 16pcs

- Shutter, used, 12pcs

- Gas shower, used, 14pcs

- PCS pot, used, 1pc

- Sputtering source flange, used, 2pcs

- Set of transportation wheels, used, 1pc

- FloTron™ Power supply, new , 1pc

- Digital precision pressure switch, new, 1pc

- Y-splitter PROFIBUS HiPace, new, 1pc

- Solid state switch, new, 2pcs

- Proximity switch IME08 50mm, new, 1pc

- Optical sensor head, new, 4pcs

- Hlcps spring, sst, new, 10pcs

Substrate holders

- substrate holder for witness 25.4 mm dia., used, 6 sets

- substrate holder for test samples 25.4mm dia., used, 13 sets

- holder for 48mm dia. substrates, used, 14pcs

- holder for 101,6mm dia. substrates, used, 24pcs

- holder for 50mm dia. substrates, used, 22pcs

- holder for 50,8mm dia substrates, used, 27pcs

- holder for 76,2mm dia substrates, used, 19pcs

- holder for 23,8mm dia substrates, used, 13pcs

- holder for 25mm dia substrates, used, 20pcs

- holder for 21,5mm dia substrates, used, 6pcs

- holder for 30,5mm dia substrates, used 12pcs

- holder for 30mm dia substrates, used, 13pcs

- holder for 101,5mmx38mm substrates, used, 12pcs

- holder for 41mmx33mm substrates, used, 6pcs

- holder for 25,4mm dia substrates, used, 18pcs

- holder for 37mm dia substrates, used, 7pcs

- holder for 50,8mmx25,4mm substrates, used, 6pcs

- holder for 180mm dia. substrates, used, 9pcs

- holder for 100mm dia. substrates, used, 15pcs

- holder for 12,7mm dia. substrates, used, 10pcs

- holder for 55mm dia. substrates, used, 9pcs

- holders for other various square dimensions substrates, used, 220pcs

- holders for other various circular dimensions substrates, used, 200pcs

- aluminum cover for substrate holders, used, 55pcs

Issues:

- Faulty GSM 1100 module

- Faulty Sputtering Source 300/320 RT (station 2 in the layout diagram)

- Faulty forevacuum pump Edwards iLX120

2015 Vintage