2011 Lam Rainbow 4500B XL 150mm Plasma Etch

Technical Specification – Etch Tool

System Model: LAM Rainbow XL (45xx Series)

Specific Model: 4526 XL

Process: Oxide Etch

Wafer Size: 150 mm (JEIDA flat)

Valve Type: VAT 65

Electrostatic Chuck (ESC): Yes

Tool Configuration

• Bulkhead: Installed
• Endpoint Detection: Monochromator (Yes)
• Software: Envision v1.6.1-005

RF Sources:

• ENI GHW-50 (13.56 MHz)
• ENI 2 MHz supply
• RF Cart: Present

• ISO Module: No
• AC Distribution: AC Box -002 (with breakers)

Process Gas Setup – Chamber 1

• Argon (Ar): 500 sccm
• CF₄: 20.0 sccm
• CHF₃: 20.0 sccm
• C₄F₈: 19.5 sccm
• CO: 200.0 sccm
• O₂ (Low Range): 20.0 sccm
• O₂ (High Range): 1000.0 sccm
• N₂: 95 sccm

Wafer Handling

• Robot Type: Harmonic Drive
• Loader: Hine Indexers 38A
• Loadlock: Dual (Entrance & Exit)

Vacuum & Exhaust

• Turbo Pumps: HGP pumps on loadlocks
• Pump Controllers: HGP controller set

Control & Power

• Gas Box: Installed
• AC Rack: Yes (local power box, located in basement)

Condition

• Missing/Defective Parts: None reported