Raith PIONEER EBL System

The system is operational and is still installed and running.

Condition: Working order with no missing parts

Wafer Sizes:

2"/50mm, 3"/75mm, 4"/100mm, 5"/125mm, 6"/150mm

- great condition and has been maintained in a class 100 cleanroom

-Electron beam lithography (EBL) with scanning electron microscopy (SEM)

-30kV column

OEM Model Description

With sub 20nm lithography, highest resolution imaging capabilities and very low cost of ownership, the PIONEER is the ideal choice if you are looking for an uncompromised and affordable solution for fabrication and inspection of nanostructures. The PIONEER is the first true EBL/SEM hybrid available!