AMAT Centura DPS II MESA
AMAT Centura DPS II MESA
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Description
Wafer Size:
300
Process:
Poly
No EFEM:
Buffer chamber : NO VHP robot
4 Process chamber (3x DPS II, 1x Axiom) ( No Turbo pump)
AC rack
Specifications
| Manufacturer | AMAT |
| Model | Centura DPS II MESA |
| Condition | Used |
| Stock Number | BM5848 |