2012 Lam Research Alliance (A6) TCP 9400DSiE III

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 200mm

Transport Module / TCP9400DSiE III Modules for Deep Silicon Etch

Software: A4.1-019c

PM2 - TCP9400DSiE III - Deep Si Etch

PM3 - TCP9400DSiE III - Deep Si Etch

PM4 - TCP9400DSiE III - Deep Si Etch

ESC - Ceramic

Mobi Gas Box

PM2 - (8) - Brooks GF125

PM3 - (8) - Brooks GF125

PM3 - (8) - Brooks GF125

Brooks Automation Mag 7

Dry Pumps:

Busch DS80 Cobra (3)

Busch BA100 (2)

Chillers:

TCU - Edwards 40/80 Plus (3)

(2) MKS Cold Traps on foreline above pump

RPM - Voltage SAG Enhanced