2018 LAM Research Alliance (A6) TCP 9400DSiE G

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 200mm

Transport Module / TCP9400DSiE G Modules for Deep Silicon Etch

Software: A4.1-053a

PM2 - TCP9400DSiE G - Deep Si Etch

PM3 - TCP9400DSiE G - Deep Si Etch

PM4 - TCP9400DSiE G - Deep Si Etch

BASR Option on PM2, PM3 & PM4

Coulombic ESC - Ceramic

Mobi Gas Box

PM2 - (10) - Brooks GF125

PM3 - (10) - Brooks GF125

PM4 - (10) - Brooks GF125

Brooks Automation Mag 7

Dry Pumps:

Busch DS80 Cobra (3)

Busch BA100 (2)

Chillers:

TCU - SMC HRZ004-L-C Thermo-Chiller (3)

(3) MKS Cold Traps on foreline above pump

RPM - Voltage SAG Enhanced