2023 Lam Research 2300 Flex45/HP Metal/Microwave Strip Tool

• Flex45 Dielectric Etch Process Module
• HP Metal Etch Process Module
• Microwave Strip Process Module
• 3ea Loadports - Currently Configured for 200mm Open Cassettes
• All Pumps, Generators & Accessories Included
• Unused Since Installation/Qualification

LAM RESEARCH 2300 Dielectric/Metal Etch Tool

• 2300 Platform V2 Etch Transfer Module
• 3ea 200mm Open Cassette Loadports
• Front & Side User Interface Monitors
• CDM Wafer Handling Robot
• 2300 Exelan Flex45 Dielectric Etch Process Module
• OES 2 End Point Detection
• Low Temperature ESC
• Boce 2700 LPM Turbo Pump
• 16 Regulated Gas Channels
• Versys HP Metal Etch Process Module
• OES 2 End Point Detection
• Boce 2200 LPM Turbo Pump
• 16 Regulated Gas Channels
• Microwave Stripper Process Module
• On Board Gas System
• 3 Regulated Gas Channels