1996 ASML PAS 5500 / 300 C DUV Stepper (Deep Ultraviolet)

- Can be configured for 3" - 6"

- Upgrade to 5500/300C via lens upgrade

- Upgraded workstation

- Extended N/A Option

- Stage Interferometer Bad

- Cymer 5600 Laser

- Laser Chamber changed

- Laser Path Optics recently replaced

- ASML test reticles

CM Options:

- REFL Img Sensor

- PEP 1 Productivity upgrade

- PEP 2 productivity upgrade

- Reticle error compensation

- Flatness Model

- LSQ Disto Model

- Mark sensor

- Batch streaming

- Intensity 2

- Aerial Key

- Extended NA range

- Focal adjustment

- Alignment reports

- Annular illumination

- Scribblelane Marks

- Library

- Visual alignment cameraKnown Issue - Stage Interferometer needs to be replaced

1996 Vintage

Still installed.

Lens data is not available at this time