2021 Wentworth Pegasus™ S200FA Semi-Automatic Probe Station

Model: S200FA

Wafer Size: Up to 200 mm (8")

Type: Semi-automatic analytical wafer probe station

Control System: MAC-01 control with user-defined I/O and local keypad control

option

Key Features

 Programmable X-Y stage with full 200 mm travel

 Z-axis travel: 11 mm with precision height control

 2-point theta alignment for wafer orientation

 Integrated keyboard and joystick operation

 RS-232 and IEEE-GPIB communications for instrument interfacing

 Supplied with LabMaster software and industrial PC (Windows 10, keyboard &

monitor)

Optics and Imaging

 Trinocular Stereo Zoom Microscope

 Magnification range: 36× – 130×

 LED coaxial illumination

 5 MP colour camera with 1" CCD adaptor, network card & dongle

Chuck and Shielding

 Nickel-plated 200 mm chuck

 Electrical shielding enclosure (closed base) – 1200 mm W × 870 mm D ×

1080 mm H

 Probe card holder

Bench and Accessories

 Heavy-duty high-stability prober bench with rack mounting

 Fully integrated prober controller interface & panel

Software and Connectivity

 Pegasus Control Package FA with full automation control

 RS232 / GPIB interfaces for test instrument integration