2006 ASML PAS 5500/100D i-Line Stepper

200mm

Manufacture Date: 2006-10-15

HDD Status: Included – With Software

Recent Performance Data:

• NCE X (nm): 46.5 / 45.7 / 46.2
• NCE Y (nm): 45.6 / 51.9 / 56.3
• Focus (nm): -0.102 / 0.025 / 0.048
• Rx (µrad): -4.707 / 5.964 / 0.877
• Ry (µrad): 4.847 / -3.871 / 1.188
• FPD (µm): 0.319 / 0.313 / 0.333
• Astig (µm): 0.267 / 0.291 / 0.302
• Illumination Uniformity: 1.19% @932 / 1.15% @897 / 1.07% @991
• Straylight (%): 4.29 / 4.32 / 4.27