2006 ASML PAS 5500/100D i-Line Stepper

Manufacture Date: 2006-09-15

HDD Status: Included – With Software

Recent Performance Data:

• NCE X (nm): 31.8 / 31.1 / 25.8 (<60)
• NCE Y (nm): 27.9 / 27.3 / 34.7 (<60)
• Focus (nm): 0.006 / 0.141 / 0.073 (<200)
• Rx (µrad): -3.483 / 0.171 / -4.721 (<10)
• Ry (µrad): -6.136 / 5.259 / 2.272 (<10)
• FPD (µm): 0.598 / 0.683 / 0.728 (<0.45)
• Astig (µm): 0.454 / 0.495 / 0.51 (<0.35)
• Illumination Uniformity: 1.33% @810 / 1.31% @802 / 1.41% @952 (<1.5)
• Straylight (%): 1.09 / 0.89 / 0.89