ASML AT 1100 Twinscan

ASML Twinscan AT 1100 Wafer Scanner

• Cymer Nanolith 7600A 193nm ArF Laser System
• Dual 300mm Wafer Stages
• FOUP Loadport with Optional Open Cassette Handling
• For 200mm & 300mm Wafer Stages
• Reticle Stocker for 6" X 6" Reticles
• 3ea Water Chillers Included
• All Air Handling Equipment Included
• Tool Is Ready for Crating
• Wafer Handling Random Access Robot
• Controller Type PC/VME
• Interfaced to PR Track YES
• Environmental Enclosure Provided YES
• Accessories Extraction Unit
• Condition Very Good
• Power Requirements 230/460 V   50/60 Hz
• CE Marked YES