ASML AT 1100 Twinscan
ASML AT 1100 Twinscan
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Description
ASML Twinscan AT 1100 Wafer Scanner
- Cymer Nanolith 7600A 193nm ArF Laser System
- Dual 300mm Wafer Stages
- FOUP Loadport with Optional Open Cassette Handling
- For 200mm & 300mm Wafer Stages
- Reticle Stocker for 6" X 6" Reticles
- 3ea Water Chillers Included
- All Air Handling Equipment Included
- Tool Is Ready for Crating
- Wafer Handling Random Access Robot
- Controller Type PC/VME
- Interfaced to PR Track YES
- Environmental Enclosure Provided YES
- Accessories Extraction Unit
- Condition Very Good
- Power Requirements 230/460 V 50/60 Hz
- CE Marked YES
Specifications
| Manufacturer | ASML |
| Model | AT 1100 Twinscan |
| Condition | Used |
| Stock Number | BM5919 |