1997 Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE
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Description
Vertical Furnace
Furnaces/Diffusion Systems
Date of Manufacture: 1997-12-31
Currently Configured for: 200mm
Current status: system in idle mode, powered-up
Tube cooled down since: 21 July 2025
Last process: 08 July 2025
Last maintenance: 27 June 2025
Specifications
| Manufacturer | Tokyo Electron Ltd. (TEL) |
| Model | ALPHA-8S ATM OXIDE |
| Year | 1997 |
| Condition | Used |
| Stock Number | BM5973 |