2001 AMAT Mirra 3400

Complete

Installed under power

6", 8"

- Cassette Que: 4 Wet

- Handling: Wet In / Wet Out

- Platens: 3

- Polish Heads: 4

- Slurry Delivery: Rotary pump (6)

- Slurry Configuration: AB, AB w/ Position Sensor

- Slurry Delivery Arm Type: Extended w/ 4 Outputs

- ISRM P 1: iScan / Full Scan/M. Torque

- ISRM P 2: Full Scan/M. Torque

- ISRM P 3: Full Scan/M. Torque

- UPA: IT / RR / MEM

- UPA Supply: Nitrogen Gas

- Head Types: Titan I

- Pad Conditioner: DDF 3

- Min / Max Platen Speed: 0 -125 rpm

- Min / Max Slurry Flow:  15 - 400 ml/mn

- Min / Max Head pressure: 0.7 - 14 psi

- Min / Max PC Downforce: 3.0 - 17 lbf

- Endpoint Software: IB 11 J 1

- Polisher Software: mp 2 B 6.2_36

- Hard Drive Configuration: XP / 68 Pin SCSI

With:

- Heads: 150 mm (4), 200 mm (4)

- HCLU: 150 mm Conversion Kit, 200 mm Conversion Kit

- Loading Tank Track: 150 & 200 mm 4 Position Cassette Holders

-Teflon Cassettes: 150 mm Teflon Cassettes (2), 200 mm Teflon Cassettes (2)

Modifications:

- Balanceworx Remote Cascade Upgrade (relocation of the polishing head pneumatic controls oof the spindle to top of tool)

- Balanceworx Sigma 7 Series NSK Head Motor & Drivers

2001 Vintage