Karl Suss MA 100e/150e

Mask Aligner Karl Suss MA 100e/150e (refurbished by expert), TSA, up to 4”, or 6” Wafer or Substrate, with new Software and PC under Windows 10. In like new condition.

Configuration:

Suss MA 100/150e Automatic / Windows 10 Based Machine

Cassette to Cassette handling system

Proximity Contact - Vacuum/Cont.

2  Cassette Station MA150  W2“ to W6“ (Wafer and Substrate

3  Alignment System TSA / fully - Automatic and manual alignment system

4  DVM Microscope incl. 5x / 10x / 20x Objective

5  Turret kit DVM6

6  LH350 and CIC1200 power supply

7  HG Lamp 350W

8  Exposure Optics UV 400 HP

9  Suss 2 Channel light -sensor 365 / 400 NM

10 Transport Plates Kit W100 -W150

11 Exposure Chuck W150 Cont./Prox.

12 Maskholder MA150 W6“ - M7“

13 Prealigner Station Non-Cont. W3“ up to W6“

14 Exposure test dial 150mm

15 Lamphouse 1000 W

16 6" Chuck

All work will be done to SUSS Standards and Specification, Test Exposure and customer qualification can be done.

Vintage: 

2010

Condition: 

very good