Suss Microtec MA6/BA6 mit TSA (Topside Alignment) und BSA (Backside Alignment)

SUSS MA6 ALIGNER TSA/BSA - Remanufactured to new condition

basic system prepared for manual alignment stage with:

- automatic wedge compensation system

in contact or without contact between mask and wafer (with reference balls),

Alignment gap programmable from 1 to 1000 micron, resolution 1 micron

- movement range:

X +/-10.0mm, Y +/-5.0mm, Theta +/-5°

basic equipment consisting of:

- machine base with mechanical, pneumatic and electrical equipment

230V/50Hz and 115V/60Hz

- adapter system for mask holders

for use in combination with mask holders for masks up to 7" x 7" max.

- TSA microscope stage with

motorized X-Y manipulator and manual rotation for microscope

- with integrated microscope tilt for exposure and to create access for

mask loading

- prepared for fixed exposure unit

- manual loading and unloading of wafers or substrates

- microprocessor control with LCD display

- for wafers 2" up to 150 mm dia. or substrates 2" x 2" up to 6" x 6"

- operator manual in English

- prepared for BSA microscopes with working distance 26mm

- among other things to be ordered separately:

- manual alignment stage system dependent on necessary BSA microscope

objective separation

- TSA and/or BSA scopes

- exposure unit, lamp and optics

- mask holders and chucks

- other accessories are available

Exposure Unit MA6/BA6/350W

- Optics housing and mirror housing with ellipsoidal mirror and surface mirror

- For wafer/substrate sizes up to 150mm diameter / 6" x 6''

- For exposure lamps up to 500W possible

- Prepared for use in combination with exposure optics optimized for high

uniformity and high intensity for various wavelengths and applications:

- Range of wavelengths: 250nm to 435nm with 350W lamps

- With components for optimized diffraction reduction for high resolution

proximity or contact printing

- For large gap exposure or thick resists

BOTTOM SIDE ALIGNMENT SYSTEM'MA6/BA6/BA8 AA=26 FOR DVCU SYSTEM

- two special video microscopes

with one magnification 128X/410X (refers to 17" monitor)

- motorized stages

- separation in X: 15mm ...100mm

- travel in Y: - 20mm to + 50mm

- motorized focus 6mm

- two 1/2" CCD video cameras

LAMP ADAPTER LH350/HBO350W/S

HG LAMP 350W / Osram

OPTICS UV400/W-150/LH350

Consisting of:

- Cold light mirror no 1 100x115mm

- Fly's eye

- Condensor lens, Herasil, dia. 55mm

- Two lens plates, Herasil, conf. A

- Font lens, transparent, dia. 180mm

LAMP POWER SUPPLY UNIT CIC12OO FOR LH35O

- Constant light intensity mode

- Constant power mode

- For the DC lamps 200W, 350W/S, 500W, XE 500W

- Operation of additional lamp with a current of up to 35A possible

(has to be specified and agreed upon)

- Easy operation due to microprocessor control

- Simultaneous digital display of light intensity and lamp power

- Integrated connector for UV probe for easy calibration

- Dual channel mode for 2-channel light sensors with various wavelengths

- Interlock for machine and lamp protection

- For input voltages of 230V +/- 10%, 50/60Hz

- Power consumption: maximum 2300 VA

- Single pulse ignition ensures gentle operation, provides easy lamp start

and increases lamp durability

SUSS 2-CHANNEL LIGHT SENSOR 365/405NM FOR CIC

- For lamp power control

- Installed inside mirror house

ALIGNMENT STAGE MA/BA6-8/WD-26/MAN

- X-Y-THETA alignment stage with high precision micrometer screws

for manual alignment

- WEC Head for BSA microscope objective separation in X direction from

15mm to 100mm

- motorized Z axis

ENHANCED IMAGE STORAGE SYSTEM DVCU FOR MA8/BA6

image storage and fine focus controller for simultaneous focused images of

mask and wafer for easy and precise alignment with large object magnification

or large alignment gaps

- PC with image and fine focus control

- for M306/8, DVM6/8 and BSA

17" TFT flat screen

- integrated trackball

- 5-VGA resolution 1280x1024

- contrast integration function for pure contrast images

- electronic brightness. contrast and magnification adjustment

- adjustment of brightness ratio stored/live image

SUSS M336 MICROSCOPE DVM

MICROSCOPE ILLUMINATION 85W/M500/M306/MA6/BA6/LH350

- With yellow filter

- Halogen illumination 13.8V/85W to be attached to MA6/BA6 with LH350

SET OF TURRETS FOR 3 LENSES DVM6/8

LENs LMPL 10XIR/0.30

SUSS UV OPTOMETER CASE CPL.

- For intensity and intensity uniformity calculation

- Dose measurement functionality

- To be ordered with SUSS OPTOMETER sample (365/405nm: G187080)

- Storage case for measurement system and probes

SUSS UV LIGHT MEASURING PROBE 365/405NM for UV OPTOMETER

- Combined 2 channel probe 365/405nm

- Improved measurement accuracy and repeatability

- improved shock resistance

- only in combination with SUSS UV OPTOMETER (G207355)

CHUCK MA6/BA6/VAC/BSA/W-100

- For wafer diameter 100mm

- For proximity, soft and vacuum contact exposures

- With 2 openings for viewing of alignment pattern X=32mm x Y=20mm

- Center position of openings Xl/r=t30mm Y=0 (relative to chuck center)

- With prealign pins

- for Top Side and Bottom Side Alignment

MASK HOLDER MA6/ BA6/ BL/PROX/CONT/M-5-6/W-100

- Bottom loading

- Contact/proximity wedge error compensation

- For masks from 5"x5" to 6"x6"

- Exposure opening for wafers dia. 100mm

- With displaceable stop pins

- With displaceable additional mechanical clamping

SUSS MA6/BA6 VIBRATION ISOLATION AND DAMPING SYSTEM

- Anti-vibration machine base frame / black

- Dimension: 930mm x 950mm x 705mm

- One shelf 280mm x 700mm, height adjustable

- Three covers right, left and backside

- Four wheels

- Handrest for ergonomic operation of the machine

- Pneumatic vibration isolation and automatic height control

- Vertical frequency of resonance: < 2Hz at rated load

- Horizontal frequency of resonance: < 1.8Hz at rated load

- improved horizontal damping

- Max. load: 590kg

- Vertical adjustment stands

- Suitable for cleanroom class 100

OPERATOR'S MANUAL MA6 MA8 BA6 BA8 ENGLISH FOR CLEANROOM

- Additional operator's manual in English

The photos were taken during the refurbishing.