2015 Sentech SI 500 D (PE-CVD)
2015 Sentech SI 500 D (PE-CVD)
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Description
- thin film deposition
- encapsulation
- coating
- eg SiO 2 , SiN x , SiON x , a Si
- up to 200 mm wafers
- glovebox for high purity sample loading
Condition:
working, like new
Vintage:
2015
Specifications
| Manufacturer | Sentech |
| Model | SI 500 D (PE-CVD) |
| Year | 2015 |
| Condition | Used |
| Stock Number | BM6054 |