2021 Suss Microtec ACS200Gen3

Electric Power:

• Voltage: 400V 3-phase + N + PE
• Power: 16 kVA
• Frequency: 50 Hz
• AIC: 100 kA / 400 VAC
• FLC: 23 A
• SCCR: 5 kA
• Max. Single Load: 5.5 A

Pneumatic Connections:

• CDA (Air): 6 bar ±10%
• Nitrogen (N₂): 6 bar ±10%
• Vacuum (VAC): -0.8 bar ±0.1%
• DIW (Deionized Water): — bar

Compliance: CE Marked