Brewer Science APOGEE Bake Plate System

High-Precision Thermal Processing System

The Brewer Science APOGEE Bake System is a benchtop thermal processing tool designed for

precise, repeatable baking of semiconductor wafers and advanced substrates. It is used extensively in

semiconductor manufacturing, advanced packaging, photoresist processing, and adhesive curing

workflows.

Key Capabilities:

- Rapid, uniform substrate heating

- Supports contact, vacuum, and proximity bake modes

- Ideal for photoresist soft bake, hard bake, and curing steps

- Advanced temperature controls up to ~300°C (model dependent)

- Integrated touchscreen with recipe programming

- Optional N2 purge and vacuum capabilities

Applications:

- Photoresist baking and solvent removal

- Thin wafer processing and temporary bonding workflows

- Film and adhesive curing for packaging processes

- R&D; labs and low-to-medium volume production

Why Choose Brewer Science APOGEE Bake System?

- Faster heating vs. traditional ovens

- Excellent uniformity across the substrate

- Compact, benchtop design for flexible integration

- Reliable, data-driven process control with Brewer Science DataStreamTM