1997 Akrion UP-V2 HL.2000

AKRION UP-V2 HL.2000

3 Tank Semiautomatic Chrome Etch Station w/Linear Robotic Transfer

Wafer Size Range   Maximum 200 mm  Set Size 150 mm

Number of Positions 3

Number of Robots 1

Automatic Wafer Transfer YES

Automatic Wafer Transfer Type Robotic

Controller Type PLC Controller Type

Other Information 

PLC Controlled

Constructed of Corzan 4910 CPVC

TANK 1: PVDF Dual 8” DI/Chrome Etch - Ambient Recirc Bath

TANK 2: PVDF Dual 6” DI Dragout - Ambient Static Bath

TANK 3: PVDF Dual 6” QDR - Cold

Year of Manufacture 1997

Condition Excellent