Akrion UP-V2 SA.3200

Akrion UP-V2 SA.3200 - PARTS TOOL ONLY

Semi-Automatic Wet Process Station Parts Including Process Tanks, Robots and More

Wafer Size Range   Minimum 75 mm  Maximum 150 mm  Set Size 150 mm

Automatic Wafer Transfer YES

Automatic Wafer Transfer Type Robotic

Controller Type PLC Controller Type

Other Information 3ea UP AKRION Model UP-ATA Robots w/Controllers

• 4ea Temperature Controlled PVDF Process Baths 16” x 9” x 10”(id) w/Re-circulation and Filtration
• 3ea PVDF QDR tanks 16” x 9” x 9” (id) w/Lid Spray
• SIEMENS PLC Control System
• 3ea IWAKI WALCHEM CORP. Model MD 100LFY-1 Magnet Pump
• 1ea TREBOR Magnum 610 Pump
• 4ea WAFAB Heat Exchangers

Power Requirements    3 Phase