Minato MM-6600

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Description

Minato MM-6600 Wafer Mobility Tester

  • MECS UX-1000 Wafer Handling Robot
  • PC Controlled

Wafer Size Range   Minimum 75 mm  Maximum 200 mm

Cassette to Cassette YES

Number of Send Elevators 1

Number of Sort Elevators 0

Wafer Handling Standard Robot

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Specifications

ManufacturerMinato
ModelMM-6600
ConditionUsed
Stock NumberBM6153