2011 AMAT Centura TPCC EPN

Electro Polished Nickel Frame & Modules

2ea ENP Centura Loadlocks for 200mm Wafers

Wafer Transfer Chamber with HP Robot

High Temperature Quartz End Effector

On the Fly Wafer Centering

2ea TanOx Chambers - Positions C & D

2ea ENP Fast Cooldown Chambers

V452 Main Control Board

Gas Panel with 2ea Gas Pallets

Interconnect Cables

AC Distribution Rack – 160A

Through the Wall Installation Kit

Please Inquire for Additional Details

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Number of Chambers 2

Controller Type PC/VME

Process Gases 2ea Pallets

Condition Very Good