BRANSON/IPC Series 2000

BRANSON/IPC Series 2000 Plasma Barrel Photoresist

• BRANSON/IPC S2005-11020Reactor Center with 10” (i.d.) X 20” (h) Quartz Chamber
• S2000C Controller with 2ea Rotometer Controlled Gas Channels
• ENI OEM-12 1000 Watt RF Generator

Etcher Type Barrel

Rated Power Output 1000 Watts

Reactor Center Cylindrical

Reactor Center Size   Depth 20.00  in  (50.80 cm)  

Diameter 10.00  in  (25.40 cm)

Reactor Center Material Quartz

Number of Gas Inputs Two Gas

Automatching Network Included Yes

Vacuum Pump Included No

RF Generator Model ENI OEM-12