LAM 9600SE Rainbow Metal Etch Tool

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Description

Lam Research 9600SE Rainbow Metal Etch Tool

  • Rainbow Configuration Includes Post-Etch PR Strip Chamber
  • Envision Software
  • Configured for 200mm Wafers
  • Currently Running in Fab – 9/16/2024

Wafer Size Range   Minimum 150 mm  Maximum 200 mm  Set Size 200 mm

Process Metal Etch

Cassette to Cassette YES

CE Marked YES

Condition Excellent

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Specifications

ManufacturerLAM
Model9600SE Rainbow Metal Etch Tool
ConditionUsed
Stock NumberBM6184