Bio-Rad QS-500

Bio-Rad QS-500 FT-IR Spectrometer

• Transmissive & Reflective Film Measurement 
• Si Epi Thickness, C & O in Si, BPSG Analysis
• KBr Optical Components
• Bio-Rad SPC 3200 Data Station
• Upgradable to Computer Running Windows XP 
• Bio-Rad 013-4100 Spectrometer Controller
• Bio-Rad Stage Controller
• Bio-Rad Robot Interface
• Genmark Robot & Controller

Wafer Size Range   Minimum 100 mm  Maximum 200 mm  Set Size 200 mm

Wafer Mapping YES

Scanning Stage YES

Controller Type PC Controller Type

Cassette to Cassette YES

Condition Excellent

Refurbished YES