GCA/Tropel 9000

Surface Flatness Analyzer

• Description Wafer Flatness Analyzer
• Other Information 
• Fringe Sensitivity Range: 0.5 to 10.0 micrometers per fringe
• System Accuracy: 0.25 micrometers
• Maximum Test Area: 5.0 x 4.5 inches
• Maximum Resolution: 0.10 micrometers
• Tilt Adjustable Work Holders in 2 Dimensions:
• 4” x 4”, 5” x 5” Photo plates
• 2” and 3” Wafers and Slices
• Light Source: HeNe Laser
• Dimensions: 23”H x 181/2”W x 101/2D