2011 LAM (Novellus) Vector Express AHM

Size : 300mm(12")

Vintage : 2011'Y

Process Chamber : AHM X 1 Chamber

* 2 FOUR Brooks Vision 9 loader

* ATM Robot & Controller KIT RBT W/8.4" ARMSET & CNTRLR VORTEX

- ATM Robot End Effector (Friction Type)

* Cooling Pedestals in Loadlocks (Loadlock pump : KASHIYAMA NV60N-5 )

* Front Main UI and Chase Computer

* Process Chamber

- RPS : MKS AX7645RH-01 & MKS AX7645PS-01

- RF LF Generator : 2.75KW COMDEL CLX-2750

- RF HF Generator : 2KW AD-TEC AXR-2000

- Macher : 13.56MHZ 5KW

- Macher : 400KHZ

* Loadlock MANO Meta 10 Torr

* Process Module MKS Baraton 10 Torr (Heated)

* Process Module MKS Baraton 1000 Torr

ATM Robot & Controller KIT RBT W/8.4" ARMSET & CNTRLR VORTEX

- ATM Robot End Effector (Friction Type)

Cooling Pedestals in Loadlocks (Loadlock pump : KASHIYAMA NV60N-5 )

* Process Chamber

-RPS : MKS AX7645RH-01 & MKS AX7645PS-01

- RF LF Generator : 2.75KW COMDEL CLX-2750

- RF HF Generator : 2KW AD-TEC AXR-2000

Loadlock MANO Meta 10 Torr

Process Module MKS Baraton 10 Torr (Heated)

Process Module MKS Baraton 1000 Torr