2006 KLA-Tencor Archer 200 AIM

KLA-TENCOR Archer 200 AIM Overlay Metrology Tool

• ETAL Stage
• Yaskawa Robot with NXC100 Controller
• IDE Maxon 1000 Floatation Controller

 Wafer Size Range   Minimum 200 mm  Maximum 300 mm  Set Size 300 mm

Cassette to Cassette YES

Condition Excellent

Year of Manufacture 2006

CE Marked YES

Number of Cassette Elevators 2

Wafer Handling Random Access Robot

Mini-Environment YES