Nanometrics 8300XSE

Nanometrics 8300XSE Film Thickness Analyzer

• J.A. Woollam M-44 Spectroscopic Ellipsometer
• J.A. Woollam EC-270 Ellipsometer Controller
• J.A. Woollam LPS-420 Xenon Light Source
• Manual Loading of up to 300mm Wafers
• Yaskawa ERCR-NS01-B004 Motion Controller
• Please Inquire for Additional Details

Wafer Size Range   Minimum 200 mm  Maximum 300 mm  Set Size 300 mm

Illumination Source Type Multi-wavelength Source

Multi-Layer Film Capacity YES

Micro Spot Optics YES

Scanning Stage YES

Wafer Mapping YES

Controller Type PC Controller Type

Condition Excellent

Power Requirements 115 V   15.0 A   50/60 Hz   1 Phase