2000 AMAT 9500XR Implanter

Applied Materials 9500 XR 200 S System 6"

Deinstalled in fab.

- 3 Phase + Neutral

- 50/60 Hz

- 208 V

- CPU: MVME162-P244LSE

- Software: 4.06

- Gas Box:

- BF3: SDS

- PH3: SDS

- AsH3: SDS

- SiF4: SDS

- Argon: External Feed

Pump Config:

- Chamber: CT-10 Cryos

- Source Turbo: STP-1000C

- Mrs Turbo: STP-361C

- Source Backing: QDP40

- Wafer Loader: QDP80 w/ EH500 Blower

- Source Type: IHC

- Enlarged Chamber                     

- Oven Capabilities: Oven fitted to source

- Source Magnet: 40A

- Extraction: Dual Bellows 60kV

- Post Acell: 160kV max, total energy 200kV max

- Plasma Flood Gun: HDPFS

- Wheel: Direct Drive

- Tilt: 0 to 7

Wafer Handling:

- Orient: fitted, not in use

- Flat Not Found Sensor: fitted, not in use

- Gripper: Hollow

- Wafer on Gripper Sensor

2000 Vintage