2001 AMAT/ Varian Semiconductor Equipment Associates (VSEA) VIISta 810

Mid Current Implanter

Ion Implanters

Date of Manufacture: 2001-01-01

Currently Configured for: 300mm

Asset HDD not included

Need use the destructive methods to deinstallation the equipment. MANY COMPONENTS ARE MISSING.

Damage/Missing parts list, please inspect tool to reconfirm.

Dry pumps and Chiller and Cryo Compressors not included on sales.

Inspect to confirm configuration and condition.

Loading Configuration FOUP

Number of Cassette/FOUP Positions is 4

Loadport Make/Model ASYST 300 OHT Transport (300mm)  

Date of Last PM is 2013/5

The system not On-Line

Off-Line Date is 2014

All Cables are Present 

GEM/SECS Interface

Standard Network Communication Capability  

Mid Current 810 Classic 

Energy Range is 270kv

Maximum Energy is 270kv

Dose Range is 1e11~1e13

Programmable Tilt Angle is 7

Tilter Head Revision is Type c

Bernas source

Dual Vaporizer 

Dimmer Magnet Turbo

Source Turbo

EndStation Turbo

Process Chamber Cryo (x3)

Scan Chamber Cryo

Gas Type

1.HP

2.SDS

3.SDS

4.SDS

Chiller not Included

Dry Pumps not Included

Dry Pump Make Model is IQDP80

Dry Pump Make Model is IQDP80-500

Cryo Compressors not Included  

Make Model is CTI

Quantity is 2