NIKON Optistation 3

Wafer Inspection Tool for 6" Wafers

Description Automatic Wafer Inspection Station

• Cassette to Cassette YES
• Other Information Cassette to Cassette Handling of 150mm Wafers
• Non-Contact Wafer Pre-Alignment
• Trinocular Head with Motorized Nosepiece and Motorized Auto Focus
• NIKON BD Plan Objectives: 5X, 20X & 40X
• NIKON BD Plan APO Objective: 100X
• NIKON 10X Widefield Eyepieces
• EPI Illuminator (Brightfield/Darkfield) with 50 Watt Halogen Lamp
• 6” (dia.) Wafer Stage with 6" x 6" XY Programmable Motion & Joystick Manual Override
• Observing Points – 150 Channels with Max. 50 Point Memory per Channel
• 2ea X Axis Wafer Transfer Shuttles
• 2ea Y Axis Wafer Transfer Shuttles
• 2ea Send/Receive Cassette Elevators