Plasmatherm LAPECVD and Versaline System

LAPECVDs with

2x Loadlockports,

2x Processcambers

and DMC/OCR reader

The VERSALINE Large-Area PECVD platform provides a cassette-to-cassette batch solution for high-volume production. The LAPECVD provides the thousands of wafer passes per month to meet demanding production capacities. When coupled with optional in situ deposition rate and film thickness metrology, run-to-run thickness is enhanced.